A complete internal mechanical stress analysis of multilayer composite leads to optimized coating process control for 50GHz thin film filters

Authors: J. J. Pan, Joy Jiang, Feng Qing Zhou and James Guo

Publication: Published in OFC2004, MF30

Abstract: Internal stress simulation of a multilayer structure using measured wafer curvature accurately predicts the central wavelength shifts and spectrum ripple resulting from grinding and temperature change, thereby greatly improving the production yield of 50GHz filters.